Methods of etching articles via microcontact printing

US7875197B2 · kind B2 · utility

Assignee

• President and Fellows of Harvard College · US

Inventors

• George M. Whitesides · Newton, US
• Younan Xia · Atlanta, US
• James L. Wilbur · Boyds, US
• Rebecca J. Jackman · Boston, US
• Enoch Kim · Boston, US
• Mara G. Prentiss · Cambridge, US
• Milan Mrksich · Hinsdale, US
• Amit Kumar · San Ramon, US
• Christopher B. Gorman · Cary, US
• Hans Biebuyck · Thalwil, CH
• Karl K. Berggren · Arlington, US

Key dates

• Filing date: Aug 6, 2008
• Grant date: Jan 25, 2011
• Expiry date: Jul 16, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2006/12107
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Improved methods of forming a patterned self-assembled monolayer on a surface and derivative articles are provided. According to one method, an elastomeric stamp is deformed during and/or prior to using the stamp to print a self-assembled molecular monolayer on a surface. According to another method, during monolayer printing the surface is contacted with a liquid that is immiscible with the molecular monolayer-forming species to effect controlled reactive spreading of the monolayer on the surface. Methods of printing self-assembled molecular monolayers on nonplanar surfaces and derivative articles are provided, as are methods of etching surfaces patterned with self-assembled monolayers, including methods of etching silicon. Optical elements including flexible diffraction gratings, mirrors, and lenses are provided, as are methods for forming optical devices and other articles using lithographic molding. A method for controlling the shape of a liquid on the surface of an article is provided, involving applying the liquid to a self-assembled monolayer on the surface, and controlling the electrical potential of the surface.