Porous inorganic solids for use as low dielectric constant materials
US7875315B2 · kind B2 · utility
5Cited by
48References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 31, 2007 |
| Grant date | Jan 25, 2011 |
| Priority date | — |
| Expiry date | Jan 20, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249953
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
This disclosure relates generally to polymeric networks of fullerene compounds, to methods of preparing precursors for such networks, and to their subsequent use as low dielectric constant materials in microelectronic devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.