Beam recording apparatus and beam adjustment method
US7875866B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2007 |
| Grant date | Jan 25, 2011 |
| Priority date | — |
| Expiry date | Sep 19, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B7/0953
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An electron beam recording apparatus includes: a displacement detection unit including at least three displacement sensors disposed at each different angle in a radial direction of the turntable; a shape calculation unit for calculating, based on the detected displacements by the at least three displacement sensors, shape data corresponding to displacements of side surface of the turntable in the radial directions; a rotation runout computing unit for computing, based on the shape data and at least one displacement detected by the at least three displacement sensors, rotation runout of the turntable including a rotation asynchronous component and a rotation synchronous component; and a beam irradiation position adjustment unit for adjusting an irradiation position of the electron beam based on the rotation runout.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.