Patent · US Active

Scanning probe in pulsed-force mode, digital and in real time

US7877816B2 · kind B2 · utility

5Cited by

7References

21Claims

0Family size

Assignee

Witec Wissenschaftliche Instrumente und Technologie GmbH · DE

Inventors

Peter Spizig · Niederstotzingen, DE
Detlef Sanchen · Neu-Ulm, DE
Jörg Förstner · Ulm, DE
Joachim Koenen · Ulm, DE
Othmar Marti · Ulm, DE
Gerhard Volswinkler · Laupheim, DE

Key dates

Filing date	Oct 23, 2006
Grant date	Jan 25, 2011
Priority date	—
Expiry date	Dec 21, 2027

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/86
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Microscope, in particular a scanning probe microscope, comprising a programmable logic device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.