Apparatus for manufacturing flat-panel display
US7879181B2 · kind B2 · utility
10Cited by
6References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 2008 |
| Grant date | Feb 1, 2011 |
| Priority date | — |
| Expiry date | Nov 26, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6719
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.