Optical modulator using a serpentine dielectric layer between silicon layers
US7880201B2 · kind B2 · utility
9Cited by
6References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 9, 2006 |
| Grant date | Feb 1, 2011 |
| Priority date | — |
| Expiry date | Feb 20, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2202/105
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention is a method and an apparatus for optical modulation, for example for use in optical communications links. In one embodiment, an apparatus for optical modulation includes a first silicon layer having one or more trenches formed therein, a dielectric layer lining the first silicon layer, and a second silicon layer disposed on the dielectric layer and filling the trenches.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.