Integrated circuit including a capacitor and method

US7880269B2 · kind B2 · utility

Assignee

• Qimonda AG · DE

Inventors

• Frank Heinrichsdorff · Teltow, DE
• Steffen Meyer · Erlangen, DE
• Jens Schmidt · Höflaweg, DE

Key dates

• Filing date: Mar 27, 2008
• Grant date: Feb 1, 2011
• Expiry date: Jan 12, 2029

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S438/957

Abstract

An integrated circuit including a capacitor and a method of fabricating an integrated circuit. The capacitor has a first electrode. A plurality of conductive lines is separated from each other and is configured to be held at a potential being the same for all conductive lines. A second electrode encloses individual ones of the conductive lines at a top side and at least one lateral side and is separated from the first electrode by a dielectric layer. The second electrode includes a polycrystalline semiconductor material, a metal or a metal-semiconductor compound.