Patent · US Active

MEMS michelson interferometer and method of fabrication

US7880890B2 · kind B2 · utility

2Cited by

8References

21Claims

0Family size

Assignee

Block Engineering, LLC · US

Inventors

David Reyes · Boston, US
E. Robert Schildkraut · Waltham, US
Jinhong Kim · Seoul, KR

Key dates

Filing date	Dec 28, 2007
Grant date	Feb 1, 2011
Priority date	—
Expiry date	Sep 23, 2028

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49002
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An interferometer system includes an optical bench and at least two mirror structures, being patterned from one or more layers on the optical bench and erected to extend substantially perpendicularly to the bench to define two interferometer arms to provide a Micro-Electro-Mechanical Systems (MEMS) interferometer. The MEMS interferometer is further implemented in a Fourier transform spectrometer, which includes a common housing containing the interferometer and a gas cell, possibly including a preconcentrator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.