System and method for nanotube growth via Ion implantation using a catalytic transmembrane
US7883580B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 2, 2008 |
| Grant date | Feb 8, 2011 |
| Priority date | — |
| Expiry date | Jul 2, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/844
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Ion implantation is used to grow nanotubes out of carbon and other materials. Catalytic material is placed on or in a membrane that physically and possibly environmentally separates an implantation chamber or region from a growth chamber or region. High-energy ions are implanted into the catalytic material from one side to grow nanotubes on an exposed surface in the growth chamber. Ion implantation via the membrane provides for greater flexibility to separate and independently control the implantation and growth processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.