Method for making a micromachined microwave signal control device
US7886434B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 11, 2008 |
| Grant date | Feb 15, 2011 |
| Priority date | — |
| Expiry date | Jun 13, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49169
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.