Site-selectively modified micro-and nanostructures and the methods of their fabrication
US7887723B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2007 |
| Grant date | Feb 15, 2011 |
| Priority date | — |
| Expiry date | Nov 9, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y15/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
It is an object of the present invention to provide a method which can easily and selectively modify specific sites on indentations or protrusions of indentation/protrusion structures fabricated by nano-imprinting. Pressing a mold having indentation/protrusion structures onto a polymer substrate comprising at least two layers of different chemical composition exposes the second layer, which has been covered by the outermost layer, in pillars formed as a result of the pressing. Site-specific chemical modification of the pillars can be achieved by formulating a desired chemical composition for the second layer beforehand, or by chemical modification of the exposed second layer cross-sections in the pillars.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.