Plasmonic structure lens and its application for online inspection
US7888663B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2008 |
| Grant date | Feb 15, 2011 |
| Priority date | — |
| Expiry date | Aug 6, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1876
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface plasmonic polariton lens is disclosed that has an optical plate having incident thereupon waves of electromagnetic radiation. The plate also has a thin metal film of a metal having a negative permittivity. There are slits in the thin film, the slits being of decreasing radial width, and decreasing radial separation at increasing radius and being for the transmission therethrough of diffracted waves of the electromagnetic radiation. There are rings between the slits, the rings being of decreasing radial width at increasing radius and being for the transmission therethrough of evanescent waves of the electromagnetic radiation. The diffracted waves and the evanescent waves form propagated waves. A probe with such a lens, and an inspection apparatus and method using the probe are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.