Specimen inspection stage implemented with processing stage coupling mechanism
US7889322B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 10, 2007 |
| Grant date | Feb 15, 2011 |
| Priority date | — |
| Expiry date | Dec 15, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/0853
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A specimen inspection stage implemented with a processing stage coupling mechanism provides a capability to conduct with maximum efficiency post-processing specimen inspections on-board a processing platform. Heavy inspection equipment is mounted on a specimen inspection stage that is separate from a processing stage. In a preferred embodiment, the processing stage moves in response to an applied motive force and performs laser-based processing operations on a specimen. While laser processing is ongoing, the specimen inspection stage remains parked in its home position. When it is time for post-processing inspection, a stage coupling and decoupling mechanism couples together the specimen inspection stage and the processing stage, which transports the specimen inspection stage to and from the specimen position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.