Method of manufacturing member with concave portions, member with concave portions, lens substrate, transmission type screen and rear projection
US7892443B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2007 |
| Grant date | Feb 22, 2011 |
| Priority date | — |
| Expiry date | Dec 7, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29D11/00365
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method of manufacturing a member with concave portions includes preparing a base material, forming a mask formation film on the base material, forming a number of openings in the mask formation film by laser irradiation treatments using a branching filter, and etching the base material to form the concave portions in the base material. The branching filter branches laser light into first laser beams and second laser beams. Each of irradiation regions of the mask formation film sequentially is subjected to the laser irradiation treatment, so that first openings are formed by the first laser beams and second openings are formed by the second laser beams. Each of the irradiation regions has portions where no opening is formed by the first beams of the laser irradiation treatment for the irradiation region while openings will be formed by the second laser beams in one or more of the subsequent laser irradiation treatments. In the base material, concave portions for examination use are formed using some of the openings formed by the second laser beams used in the laser irradiation treatments for the specified irradiation regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.