Light scattering device having multi-layer micro structure
US7892489B2 · kind B2 · utility
7Cited by
5References
45Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 29, 2007 |
| Grant date | Feb 22, 2011 |
| Priority date | — |
| Expiry date | Dec 22, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/658
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro structure includes a silicon substrate, an adhesion layer on the silicon substrate, a bias layer on the adhesion layer, and structure layers on the adhesion layer. The two or more structure layers comprise different material compositions and a plurality of holes through at least two of the structure layers. Widths of the plurality of holes are in the range of 0.5-500 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.