Electrical circuit device having carbon nanotube fabrication from crystallography oriented catalyst
US7893423B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2010 |
| Grant date | Feb 22, 2011 |
| Priority date | — |
| Expiry date | Jan 21, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/938
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device and method associated with carbon nanowires, such as single walled carbon nanowires having a high degree of alignment are set forth herein. A catalyst layer is deposited having a predetermined crystallographic configuration so as to control a growth parameter, such as an alignment direction, a diameter, a crystallinity and the like of the carbon nanowire. The catalyst layer is etched to expose a sidewall portion. The carbon nanowire is nucleated from the exposed sidewall portion. An electrical circuit device can include a single crystal substrate, such as Silicon, and a crystallographically oriented catalyst layer on the substrate having an exposed sidewall portion. In the device, carbon nanowires are disposed on the single crystal substrate aligned in a direction associated with the crystallographic properties of the catalyst layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.