Patent · US Active

Semiconductor device having an adhesive portion with a stacked structure and method for manufacturing the same

US7893525B2 · kind B2 · utility

1Cited by
3References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 8, 2009
Grant dateFeb 22, 2011
Priority date
Expiry dateFeb 4, 2029

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3511
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

It is made possible to restrict warpage at the time of resin cure and achieve a smaller thickness. A semiconductor device includes: a first chip including a MEMS device and a first pad formed on an upper face of the MEMS device, the first pad being electrically connected to the MEMS device; a second chip including a semiconductor device and a second pad formed on an upper face of the semiconductor device, the second pad being electrically connected to the semiconductor device; and an adhesive portion having a stacked structure, and bonding a side face of the first chip and a side face of the second chip, the stacked structure including a first adhesive film formed by adding a first material constant modifier to a first resin, and a second adhesive film formed by adding a second material constant modifier to a second resin.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.