MEMS latching high power switch
US7893799B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 11, 2008 |
| Grant date | Feb 22, 2011 |
| Priority date | — |
| Expiry date | Nov 7, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2061/006
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microelectromechanical (MEMS) switch includes a substrate, a force-activated latching mechanism, and a spring-loaded shuttle. The latching mechanism has a proximal end and a distal end. In an embodiment, the latching mechanism includes two flexible latch arms each fixed at or about a proximal end and having a free distal end, and a connector connecting the latch arms. The spring-loaded shuttle includes a shuttle portion including a portion configured for engaging portions of the latch arms. The shuttle portion further being configured to translate about the substrate. The latching mechanism and the shuttle may be configured to include an electrical contact layer such that when the latch arms are engaged with the shuttle portion, a closed electrical circuit can be formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.