Test pattern based process model calibration
US7895547B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 1, 2008 |
| Grant date | Feb 22, 2011 |
| Priority date | — |
| Expiry date | Apr 14, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/68
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Embodiments of the present invention provide a method for performing lumped-process model calibration. The method includes creating a plurality of sub-process models for a set of sub-processes; creating a lumped-process-model incorporating said set of sub-processes; calculating a first set of output patterns from a set of test patterns by using said plurality of sub-process models; calculating a second set of output patterns from said set of test patterns by using said lumped-process-model; and adjusting process parameters used in said lumped-process-model to calculate said second set of output patterns to match said first set of output patterns. A computer system for performing the lumped-process model calibration is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.