Flowmeter
US7895905B2 · kind B2 · utility
4Cited by
5References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 15, 2008 |
| Grant date | Mar 1, 2011 |
| Priority date | — |
| Expiry date | Jan 26, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/8445
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.