Composition control for photovoltaic thin film manufacturing
US7897416B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 15, 2010 |
| Grant date | Mar 1, 2011 |
| Priority date | — |
| Expiry date | Jun 15, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to methods and apparatus for providing composition control to thin compound semiconductor films for radiation detector and photovoltaic applications. In one aspect of the invention, there is provided a method in which the molar ratio of the elements in a plurality of layers are detected so that tuning of the multi-element layer can occur to obtain the multi-element layer that has a predetermined molar ratio range. In another aspect of the invention, there is provided a method in which the thickness of a sub-layer and layers thereover of Cu, In and/or Ga are detected and tuned in order to provide tuned thicknesses that are substantially the same as pre-determined thicknesses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.