Imaging device and method for high-sensitivity optical scanning and integrated circuit therefor
US7897902B2 · kind B2 · utility
17Cited by
27References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 24, 2008 |
| Grant date | Mar 1, 2011 |
| Priority date | — |
| Expiry date | Dec 6, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/182
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.