Apparatus and method for housing micromechanical systems

US7898071B2 · kind B2 · utility

Assignee

• Faunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. · DE

Inventors

• Thor Bakke · Dresden, DE
• Thilo Sandner · Dresden, DE

Key dates

• Filing date: Jan 9, 2008
• Grant date: Mar 1, 2011
• Expiry date: Feb 13, 2029

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2203/0118
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

An apparatus for housing a micromechanical system includes a substrate with a surface on which the micromechanical system is formed, a transparent cover and a dry film layer arrangement between the surface of the substrate and the transparent cover. The dry film layer arrangement has an opening, so that the micromechanical system adjoins the opening.