Patent · US Active

Generating an output DC voltage with a boost converter having a controlled pulse-duty factor

US7898238B2 · kind B2 · utility

40Cited by

17References

6Claims

0Family size

Assignee

HUETTINGER Elektronik GmbH + Co. KG · DE

Inventors

Peter Wiedemuth · Herbolzheim, DE
Stefan Schirmaier · Glückstadt, DE
Markus Winterhalter · Bad Krozingen, DE

Key dates

Filing date	Jul 1, 2008
Grant date	Mar 1, 2011
Priority date	—
Expiry date	Nov 3, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH05H1/46
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method of generating an output DC voltage of a gas discharge process voltage supply unit, in which in a first voltage transformation stage a first DC voltage is transformed into a second DC voltage of a predetermined voltage range, and the output DC voltage is generated from the second DC voltage in a second voltage transformation stage. A switching element of at least one boost converter is switched with a controlled pulse-duty factor for generating the output DC voltage in the second voltage transformation stage. This method permits striking and maintenance of a plasma process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.