Probe card with stacked substrate
US7898276B2 · kind B2 · utility
3Cited by
7References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2006 |
| Grant date | Mar 1, 2011 |
| Priority date | — |
| Expiry date | Feb 21, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07307
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe card is provided including a first substrate, a second substrate, and a plurality of conductive wires extending between the first substrate and the second substrate. The conductive wires are fixed (a) at a first end to a contact of the first substrate, and (b) at a second end to a contact of the second substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.