Methods and apparatus for inspecting an object
US7898651B2 · kind B2 · utility
17Cited by
18References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2005 |
| Grant date | Mar 1, 2011 |
| Priority date | — |
| Expiry date | Oct 23, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2513
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for inspecting an object includes emitting light from at least one of a liquid crystal display (LCD) device and a liquid crystal on silicon (LCOS) device, phase-shifting light emitted from at least one of the LCD device and the LCOS device, projecting the phase-shifted light onto a surface of an object, receiving light reflected from the object surface with an imaging sensor, and analyzing the light received by the imaging sensor to facilitate inspecting at least a portion of the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.