Heating apparatus with enhanced thermal uniformity and method for making thereof
US7901509B2 · kind B2 · utility
11Cited by
11References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 16, 2006 |
| Grant date | Mar 8, 2011 |
| Priority date | — |
| Expiry date | Apr 5, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68785
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A heating apparatus for regulating/controlling the surface temperature of a substrate is provided. At least a thermal pyrolytic graphite (TPG) layer is embedded in the heater to diffuse the temperature difference of the various components in the heating apparatus and provide temporal and spatial control of the surface temperature of the substrate, for a relatively uniform substrate temperature with the difference between the maximum and minimum temperature points on the substrate of less than 10° C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.