Micro-electromechanical system (MEMS) based current and magnetic field sensor having capacitive sense components
US7901970B2 · kind B2 · utility
4Cited by
4References
6Claims
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Key dates
| Filing date | Nov 14, 2007 |
| Grant date | Mar 8, 2011 |
| Priority date | — |
| Expiry date | Feb 16, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/0286
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.