Sensor
US7902843B2 · kind B2 · utility
19Cited by
14References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2008 |
| Grant date | Mar 8, 2011 |
| Priority date | — |
| Expiry date | Aug 27, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0073
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor including a carrier having two channels, a capacitive sensing element disposed on the carrier, and a cover is provided. The capacitive sensing element has a membrane, and a first chamber is formed between the membrane and the carrier. The cover is disposed on the carrier for covering the capacitive sensing element. A second chamber is formed between the membrane and the cover. The first chamber and the second chamber are located at two sides of the membrane, and the channels are respectively communicated with the first chamber and the second chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.