Failure analysis system, failure analysis method, and program product for failure analysis
US7903844B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2007 |
| Grant date | Mar 8, 2011 |
| Priority date | — |
| Expiry date | Jan 7, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30144
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A failure analysis system includes an obtaining portion that obtains read-in image information that is image information obtained by reading an output image, a memory that stores fundamental image reduction information that is information in which an information amount of fundamental image information is reduced, the fundamental image information serving as a fundamental of the output image, a calculating portion that calculates a characteristic value of a projecting waveform by use of differential information between read-in image reduction information and the fundamental image reduction information, the read-in image reduction information being information in which the information amount of the read-in image information obtained by the obtaining portion is reduced, the fundamental image reduction information being stored in the memory; and a determining portion that determines a defect type group that is a group of defect types of elements included in the output image by use of a clustering process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.