Method for holding substrate in vacuum
US7905979B2 · kind B2 · utility
1Cited by
7References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2007 |
| Grant date | Mar 15, 2011 |
| Priority date | — |
| Expiry date | Oct 6, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2883
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In a method of the present invention for holding a substrate in a vacuum, a glass substrate (5) is held by an adhesive pad (20) or an adhesive sheet, both of which are made from a material containing a diene based resin, whereby an adhesive agent is prevented from remaining on the substrate, and the adhesive sheet can be detached with ease from the substrate after assembling the substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.