Patent · US Active

Method for producing a high purity trisilane product from the pyrolysis of disilane

US7906094B2 · kind B2 · utility

2Cited by

4References

17Claims

0Family size

Assignees

Inventors

Cyril Bourasseau · Grenoble, FR
Gregory M. Jursich · Clarendon Hills, US
Mindi Xu · Naperville, US
John Borzio · Lawrence, US
Donald Mitchell · Hayward, US
Derong Zhou · Doylestown, US
Thomas K. Moncur · Yardley, US

Key dates

Filing date	Sep 28, 2007
Grant date	Mar 15, 2011
Priority date	—
Expiry date	Feb 17, 2029

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC01B33/046
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.