Electromechanical resonator and manufacturing method thereof
US7907025B2 · kind B2 · utility
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1References
18Claims
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Key dates
| Filing date | Jan 21, 2008 |
| Grant date | Mar 15, 2011 |
| Priority date | — |
| Expiry date | May 25, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0271
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An electromechanical resonator includes a resonator portion which includes a fixed electrode and an oscillator formed separately from the fixed electrode with a gap. The gap has a first gap region and a second gap region which are arranged in a thickness direction of the fixed electrode. The first gap region is different in width from the second gap region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.