Soft X-ray generation apparatus and static elimination apparatus
US7907700B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 10, 2007 |
| Grant date | Mar 15, 2011 |
| Priority date | — |
| Expiry date | Nov 30, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2235/081
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention aims to suppress calorific value and prolong a lifetime of an apparatus that generates soft X-rays. Thus, the present invention provides a static elimination apparatus that includes an emitter as an electron emitting portion and a target, in which a thin film formed of diamond particles each having a particle size of 2 nm to 100 nm is formed on a surface of the emitter. The thin film has a diamond XRD pattern in an XRD measurement and, in a Raman spectroscopic measurement, a ratio of an sp3 bonding component to an sp2 bonding component within the film of 2.5 to 2.7:1. When a DC voltage is applied to the emitter, with a threshold electric field intensity of 1 V/μm or less, electrons larger in number than the prior art are emitted from the emitter and moreover, a temperature of the emitter is hardly increased, thus obtaining a longer lifetime.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.