Non-contact porous air bearing and glass flattening device
US7908885B2 · kind B2 · utility
54Cited by
12References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 8, 2005 |
| Grant date | Mar 22, 2011 |
| Priority date | — |
| Expiry date | Apr 19, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67784
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Thin substrates, such as flat glass panels, are levitated on a porous media air bearing creating a pressurized film of air and preloaded against the air film by negative pressure areas. The pressure can be distributed most uniformly across the pressure areas by defusing the pressure through a porous medium. Such a bearing can be used for glass flattening by holding the glass such that the unevenness is migrated to the side opposite the side to be worked on.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.