Laser processing apparatus using distinct horizontal and vertical data sets
US7910869B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 12, 2005 |
| Grant date | Mar 22, 2011 |
| Priority date | — |
| Expiry date | Dec 10, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2240/42
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser processing apparatus includes a laser source (11), a spatial phase modulator (13) configured to modulate a phase of a laser beam emitted from the laser source, a synthetic data generator (17) configured to generate synthetic data by combining hologram image data representing a pattern image to be processed with position displacement hologram data for shifting the pattern image to a prescribed position, the synthetic data being input to the spatial phase modulator for the phase modulation of the laser beams, and a focusing optical unit (14) configured to guide the phase-modulated laser beam onto a surface to be processed to reproduce the pattern image on the processed surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.