Capacitive microphone and method for making the same
US7912235B2 · kind B2 · utility
7Cited by
4References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 3, 2006 |
| Grant date | Mar 22, 2011 |
| Priority date | — |
| Expiry date | Jan 20, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4908
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A capacitive microphone and method for making the same are provided. A backplate with a plurality of holes is formed on a substrate with at least one cavity, and a diaphragm is formed above the backplate. There is an air gap between the backplate and the diaphragm. The air gap and the cavity communicate with each other by each hole. The diaphragm and the backplate are separated by a first distance and a second distance which is smaller than the first distance, such that the difference is formed on the diaphragm. The second distance area is fastened through surface stiction produced by mist or other fluids.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.