Treating agent materials
US7915159B2 · kind B2 · utility
4Cited by
43References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 12, 2005 |
| Grant date | Mar 29, 2011 |
| Priority date | — |
| Expiry date | Dec 28, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02282
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A treating agent composition for increasing the hydrophobicity of an organosilicate glass dielectric film when applied to said film. It includes a component capable of alkylating or arylating silanol moieties of the organosilicate glass dielectric film via silylation, and an activating agent which may be an acid, a base, an onium compound, a dehydrating agent, and combinations thereof, and a solvent or mixture of a main solvent and a co-solvent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.