MEMS device with tandem flux concentrators and method of modulating flux
US7915891B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 14, 2009 |
| Grant date | Mar 29, 2011 |
| Priority date | — |
| Expiry date | Aug 14, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/05
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical modulating magnetic sensor comprising a base; a magnetic transducer associated with the base that provides an output in response to a magnetic field; a pair of movable flux concentrators positioned to move relative to the magnetic transducer; the pair of movable flux concentrators having a region of high flux concentration between the pair of movable flux concentrators; the pair of flux concentrators moving together in tandem with the distance between the pair remaining substantially constant during movement; support structure for supporting the pair of movable flux concentrators; a power source for causing the movable flux concentrators to move at a frequency within a predetermined frequency range; whereby when the pair of movable flux concentrators is in a first position the region of high flux concentration is in a first location, and when the pair of movable flux concentrators is in a second position, the region of high flux concentration is in a second position; such that as the flux concentrators move from the first position to the second position the intensity of the flux sensed by the transducer is modulated as the region of high flux concentration …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.