Apparatus and method for spectroscopy
US7916291B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 6, 2009 |
| Grant date | Mar 29, 2011 |
| Priority date | — |
| Expiry date | Nov 6, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/16
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatuses and methods for performing spectroscopy and optical microscopy are disclosed. In at least one embodiment, a Raman spectrometer includes a vacuum ultraviolet light source configured to generate light having a wavelength within a window in the vacuum ultraviolet region of the electromagnetic spectrum within which a local minimum in the absorption coefficient of Oxygen occurs. The spectrometer also includes a lens device that receives a first portion of the generated light, directs at least some of the first portion of the generated light toward a target location, receives reflected light from the target location, and directs the reflected light toward a further location. The spectrometer further includes a dispersive device that receives at least some of the reflected light and outputs dispersed light produced based thereupon, and a camera module that is positioned at additional location, where the camera module receives at least some of the dispersed light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.