Wireless microelectromechanical systems (MEMS) pressure sensor with built-in calibration

US7918138B2 · kind B2 · utility

Assignees

• The Regents of the University of California · US
• United States of America as represented by the Secretary of the Air Force · US

Inventors

• Qing Jiang · Plano, US
• Harold Glick · Corona, US

Key dates

• Filing date: Feb 11, 2009
• Grant date: Apr 5, 2011
• Expiry date: Apr 13, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L27/005
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A wireless microelectromechanical system (MEMS) pressure sensor with built in calibration. An actuator is coupled with a pressure sensing device to enable the pressure to be calibrated against the known pressure exerted by the actuator. The sensing component is configured to flex under the application of force to a pure bending condition, i.e., the sensing component flexes with no or insignificant shear forces in the sensing component.