Design methodology for MuGFET ESD protection devices

US7923266B2 · kind B2 · utility

Assignee

• IMEC · BE

Inventors

• Steven Thijs · Willebroek, BE
• Dimitri Linten · Boortmeerbeek, BE
• David Eric Tremouilles · Parempuyre, FR

Key dates

• Filing date: May 7, 2009
• Grant date: Apr 12, 2011
• Expiry date: Oct 9, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D30/024

Abstract

A method for manufacturing a MuGFET ESD protection device having a given layout by means of a given manufacturing process, the method comprising selecting multiple interdependent layout and process parameters of which a first set are fixed by said manufacturing process and a second set are variable, selecting multiple combinations of possible layout and process parameter values which meet predetermined ESD constraints; determining an optimum value for at least one other parameter in view of a predetermined design target apart from the predetermined ESD constraints; determining values for fin width (Wfin), gate length (LG) and number of fins (N) on the basis of the optimum value; and manufacturing said MuGFET ESD protection device using the given manufacturing and process values.