Patent · US Active

System and method for processing an object

US7923702B2 · kind B2 · utility

1Cited by

19References

19Claims

0Family size

Assignee

Carl Zeiss NTS GmbH · US

Inventors

Wolfram Buhler · Hermaringen, DE
Alexander Rosenthal · Kempen, DE
Emmerich Bertagnolli · Munich, DE
Heinz Wanzenbock · Wien, AT
Markus Fischer · Offenburg, DE
Gottfried Hochleitner · Wien, AT

Key dates

Filing date	Nov 11, 2008
Grant date	Apr 12, 2011
Priority date	—
Expiry date	Apr 26, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31744
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.