Multi-place coating apparatus and process for plasma coating

US7926446B2 · kind B2 · utility

Assignee

• Schott AG · DE

Inventors

• Stephan Behle · Gau-Odernheim, DE
• Andreas Luttringhaus-Henkel · Darmstadt, DE
• Gregor Arnold · Bodenheim, DE
• Mathias Bicker · Mainz, DE
• Marten Walther · Engelstadt, DE
• Juergen Klein · Mainz, DE

Key dates

• Filing date: May 26, 2003
• Grant date: Apr 19, 2011
• Expiry date: Jun 5, 2025

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C08J2300/14
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A coating apparatus is provided for simplifying the introduction and removal of workpieces into and from a reactor for plasma coating and to increase the throughput. The coating apparatus has a reactor with a moveable sleeve part and a base element, at least one sealed coating chamber being defined between sleeve part and base element when the latter two parts are fitted onto one another. The coating apparatus also has a device for introducing electromagnetic energy into the at least one coating chamber. The reactor has at least two coating places.