Nozzle plate for inkjet head and method of manufacturing the nozzle plate
US7926910B2 · kind B2 · utility
1Cited by
4References
18Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 19, 2007 |
| Grant date | Apr 19, 2011 |
| Priority date | — |
| Expiry date | Feb 16, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/164
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A nozzle plate for an inkjet head and a method of manufacturing the nozzle plate includes a silicon substrate having a nozzle, a thermally oxidized silicon layer formed on an outer surface of the silicon substrate and an inner wall of the nozzle, an adhesion layer deposited on the thermally oxidized silicon layer formed on the outer surface of the silicon substrate and formed of silicon oxide, and an ink-repellent coating layer deposited on the adhesion layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.