Substrate holder, deposition method using substrate holder, hard disk manufacturing method, deposition apparatus, and program
US7927473B2 · kind B2 · utility
1Cited by
1References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2010 |
| Grant date | Apr 19, 2011 |
| Priority date | — |
| Expiry date | Apr 5, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68778
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A substrate holder for supporting an insulating substrate includes a conductive substrate holder main body having an opening, a first support member formed to protrude inside the opening from the inner periphery of the opening, and including a clamping member which supports one end portion of the insulating substrate, and a second support member including a clamping member which supports the other end portion of the insulating substrate, and is movable so as to protrude inside the opening or retract from inside the opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.