Method for manufacturing a bolometric detector
US7927908B2 · kind B2 · utility
1Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2010 |
| Grant date | Apr 19, 2011 |
| Priority date | — |
| Expiry date | Jan 12, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/0837
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The method is designed for manufacturing a bolometric detector equipped with a membrane suspended above a substrate by means of heat-insulating arms fixed to the substrate by anchoring points. The membrane has a heat-sensitive thin layer with a base comprising at least a semiconducting iron oxide. The method comprises at least a step of localized reduction and/or oxidation of the thin layer of semiconducting iron oxide to modify the degree of oxidation of the iron atom of a part of the thin layer of semiconducting iron oxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.