Patent · US Active

Synthetic silica material with low fluence-dependent-transmission and method of making the same

US7928026B2 · kind B2 · utility

7Cited by

9References

13Claims

0Family size

Assignee

CORNING INCORPORATED · US

Inventors

Dana Craig Bookbinder · Corning, US
Kenneth Edward Hrdina · Horseheads, US
Glenn Eric Kohnke · Corning, US
Lisa Anne Moore · Corning, US
Susan Lee Schiefelbein · Ithaca, US
Charlene Marie Smith · Corning, US
Ulrich Wilhelm Heinz Neukirch · Corning, US

Key dates

Filing date	Oct 28, 2005
Grant date	Apr 19, 2011
Priority date	—
Expiry date	Dec 16, 2028

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC03C2201/54
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

Disclosed in the application are a synthetic silica glass having low fluence-dependent transmission, particularly at about 193 nm, and a process for making the same. The glass may desirably exhibit a low level of fluorescence at 290 and 390 nm when activated at about 248 nm. The glass may desirably exhibit low level of LIWFD, [SiH*] and/or [ODC].

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.