Microcantilever heater-thermometer with integrated temperature-compensated strain sensor
US7928343B2 · kind B2 · utility
20Cited by
48References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 4, 2007 |
| Grant date | Apr 19, 2011 |
| Priority date | — |
| Expiry date | Apr 15, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N5/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides microcantilever hotplate devices which incorporate temperature compensating strain sensors. The microcantilever hotplate devices of the present invention comprise microcantilevers having temperature compensating strain sensors and resistive heaters. The present invention also provides methods for using a microcantilever hotplate for temperature compensated surface stress measurements, chemical/biochemical sensing, measuring various properties of compounds adhered to the microcantilever hotplate surface, or for temperature compensated deflection measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.