Sample holder, method for observation and inspection, and apparatus for observation and inspection
US7928380B2 · kind B2 · utility
6Cited by
2References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 23, 2008 |
| Grant date | Apr 19, 2011 |
| Priority date | — |
| Expiry date | Sep 29, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A sample holder used in SEM (scanning electron microscopy) or TEM (transmission electron microscopy) permitting observation and inspection at higher resolution. The holder has a frame-like member provided with an opening that is covered with a film. The film has a first surface on which a sample is held. The thickness D of the film and the length L of the portion of the film providing a cover over the opening in the frame-like member satisfy a relationship given by L/D <200,000.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.